MOVPE Technology of Fe-Compensated InP Layers for the Quantum Cascade Laser Applications

Authors

  • Mikolaj Badura Faculty of Microsystem Electronics and Photonics, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50 372 Wrocław

Abstract

Quantum cascade laser is one of the most sophisticated semiconductor devices. Its technology requires extremely high precision and layers quality. Device performance is limited by thermal extraction form laser core. One of solutions is to apply highly resistivity epitaxial material acting as insulating layer on top of the QCL. Present work describes consequent steps of elaboration of MOVPE technology of Fe-compensated InP layers for further applications in quantum cascade lasers.

References

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Published

2024-04-19

Issue

Section

Electron Technology